Determination of Ir consumption during thermal oxidation and PbZrxTi1−xO3 processing using Bragg-peak fringe analysis
Determination of Ir consumption during thermal oxidation and PbZrxTi1−xO3 processing using Bragg-peak fringe analysis
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使用布拉格峰条纹分析确定热氧化和 PbZrxTi1−xO3 加工过程中的 Ir 消耗
DOI：
10.1063/1.1346661
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发表时间：
2001
影响因子：
3.2
通讯作者：
D. Neumayer
中科院分区：
文献类型：
--
作者：
K. Saenger;D. Neumayer
在传统布拉格-布伦塔诺几何结构中使用标准 X 射线衍射技术，可以在各种多晶薄膜 (10-20 nm) 的布拉格峰周围看到厚度干涉条纹。在本文中，厚度条纹分析用于研究具有和不具有铁电 PbZrxTi1−xO3 (PZT) 覆盖层的 Ir 薄膜的氧化和粗糙化。条纹间距的变化用于确定氧化消耗的 Ir 厚度。在氧化退火（形成 IrO2 表面层）和随后的还原退火（将 IrO2 转化回 Ir）后均观察到条纹对比度下降（表明粗糙化）。通过比较裸露 Ir 膜和 PZT 涂层 Ir 膜的氧化后条纹图案即可证明，膜覆盖层具有抗氧化和粗糙化的保护作用。总体而言，我们的结果表明，厚度条纹分析可以用作加工引起的薄膜厚度的简单定量探针，并且......
Thickness interference fringes can be seen around the Bragg peaks of a variety of polycrystalline thin (10–20 nm) films using standard x-ray diffraction techniques in a conventional Bragg–Brentano geometry. In this article, thickness fringe analysis is used to investigate oxidation and roughening in thin Ir films with and without overlayers of the ferroelectric PbZrxTi1−xO3 (PZT). Changes in fringe spacing were used to determine the Ir thickness consumed by oxidation. Fringe contrast degradation (indicating roughening) was observed both after oxidation anneals (which formed a surface layer of IrO2) and after subsequent reduction anneals (which converted the IrO2 back to Ir). Film overlayers were found to have a protective effect against oxidation and roughening, as evidenced by comparison of postoxidation fringe patterns for bare and PZT-coated Ir films. Overall, our results demonstrate that thickness fringe analysis can be used as a simple, quantitative probe of processing-induced thin film thickness and...