Subsurface modifications in indium phosphide induced by single and multiple femtosecond laser pulses: A study on the formation of periodic ripples
Subsurface modifications in indium phosphide induced by single and multiple femtosecond laser pulses: A study on the formation of periodic ripples
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DOI：
10.1063/1.2423136
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发表时间：
2007-02-01
影响因子：
3.2
通讯作者：
Botton, G. A.
中科院分区：
文献类型：
--
作者：
Couillard, M.;Borowiec, A.;Botton, G. A.
利用横断面透射电子显微镜研究了光子能量低于磷化铟（InP）带隙的单次和多次飞秒激光脉冲对磷化铟（InP）样品表面下的损伤。单脉冲辐照产生了一个类似于100纳米深的陨石坑，其表面由准无定形磷化铟组成。再凝固层的中心厚度约为60 nm，并向火山口边缘以外的方向延伸。暴露于多个中心波长为2050 nm的飞秒脉冲下，会形成具有两个不同周期的激光诱导周期表面结构（LIPSS），一个周期（类似于1730 nm）小于但接近激光波长，另一个周期（类似于470 nm）小4倍。两种类型波纹下的偏析导致富in颗粒嵌入再凝固的表面层。扩展缺陷仅在多脉冲陨石坑中心以下被检测到，它们的分布似乎与LIPSS调制有关。最后，根据观察到的地下微观结构讨论了LIPSS的形成。(c) 2007年美国物理学会。
We use cross-sectional transmission electron microscopy to study the damage induced below the surface of indium phosphide (InP) samples by single and multiple femtosecond laser pulses with a photon energy lower than the InP band gap. Single-pulse irradiation creates a similar to 100 nm deep crater with a resolidified surface layer consisting of quasiamorphous indium phosphide. The resolidified layer has a thickness of similar to 60 nm at the center and extends laterally beyond the edge of the crater rim. Exposure to multiple femtosecond pulses of 2050 nm center wavelength results in the formation of laser-induced periodic surface structures (LIPSS) with two different periods, one (similar to 1730 nm) less than but close to the laser wavelength and one (similar to 470 nm) four times smaller. Segregation beneath both types of ripples leads to the formation of In-rich particles embedded in the resolidified surface layer. Extended defects are detected only below the center of the multiple-pulse crater and their distribution appears to be correlated with the LIPSS modulation. Finally, LIPSS formation is discussed in terms of the observed subsurface microstructures. (c) 2007 American Institute of Physics.