Wafer scale fabrication of highly integrated rubidium vapor cells
Wafer scale fabrication of highly integrated rubidium vapor cells
复制标题
高度集成铷蒸气电池的晶圆级制造
DOI：
10.1109/memsys.2014.6765700
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
M. Despont
中科院分区：
文献类型：
--
作者：
T. Overstolz;J. Haesler;G. Bergonzi;A. Pezous;Pierre;S. Ischer;J. Kaufmann;M. Despont
本文报道了用于小型化原子钟光谱测量的MEMS铷（Rb）蒸气电池的晶圆级制造。电池填充过程是基于将微量溶解的叠氮化铷（RbN3）移液到硅晶片上蚀刻的空腔中，通过玻璃帽的阳极键合对空腔进行密封，并将RbN3原位紫外分解成Rb和N2。操作所需的所有相关元件，如电阻加热器、温度传感器和线圈，都采用平面技术集成到蒸汽电池上。实验表明，在1秒积分时间内，短期频率稳定在10-10以下。
This paper reports on wafer scale fabrication of MEMS rubidium (Rb) vapor cells used for spectroscopic measurements in miniaturized atomic clocks. The cell filling process is based on pipetting minute amounts of dissolved rubidium azide (RbN3) into cavities etched in a silicon wafer, hermetic sealing of the cavities by anodic bonding of glass caps, and in situ UV decomposition of the RbN3 into Rb and N2. All relevant elements required for operation such as resistive heaters, temperature sensors, and coils are integrated onto the vapor cell using planar technology. Experiments showed short term frequency stability below 10-10 at 1 second integration time.