Giant Enhancement in the Thermal Responsivity of Microelectromechanical Resonators by Internal Mode Coupling
Giant Enhancement in the Thermal Responsivity of Microelectromechanical Resonators by Internal Mode Coupling
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DOI：
10.1103/physrevapplied.14.014019
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发表时间：
2020-03
期刊：
影响因子：
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通讯作者：
Ya Zhang;R. Kondo;Boqi Qiu;Xin Liu;K. Hirakawa
中科院分区：
文献类型：
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作者：
Ya Zhang;R. Kondo;Boqi Qiu;Xin Liu;K. Hirakawa
我们报告了一个巨大的增强的热响应度的双钳位GaAs微机电（MEMS）梁谐振器通过使用内模耦合效应。这是通过将MEMS梁谐振器的基本弯曲模式与基本扭转模式通过立方Duffing非线性耦合来实现的。在模式耦合机制中，我们已经发现，当MEMS谐振器的输入热以特定频率调制时，由加热引起的谐振频率偏移可以增强几乎两个数量级。所观察到的效果是有希望实现高灵敏度的热传感，通过使用MEMS谐振器，如超灵敏的太赫兹检测在室温下。
We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. This is achieved by coupling the fundamental bending mode with the fundamental torsional mode of the MEMS beam resonators through the cubic Duffing nonlinearity. In the mode coupling regime, we have found that, when the input heat to the MEMS resonators is modulated at a particular frequency, the resonance frequency shift caused by heating can be enhanced by almost two orders of magnitude. The observed effect is promising for realizing high-sensitivity thermal sensing by using MEMS resonators, such as ultrasensitive terahertz detection at room temperature.