Self Resonance Cancellation Techniques for a Two-Mass System and Its Application to a Large-Scale Stage
Self Resonance Cancellation Techniques for a Two-Mass System and Its Application to a Large-Scale Stage
复制标题
双质量系统自谐振消除技术及其在大型舞台中的应用
DOI：
10.1541/ieejjia.3.455
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发表时间：
2014
影响因子：
1.7
通讯作者：
H. Fujimoto
中科院分区：
文献类型：
--
作者：
K. Sakata;H. Asaumi;K. Hirachi;K. Saiki;H. Fujimoto
高精度工作台是用于微加工的工业设备。快速精确的定位控制是提高生产能力和产品质量的重要技术。特别地，大型平台具有低谐振模式，由于平台的结构，这干扰了快速和精确的定位。本文提出了一种新的反馈系统，在SIMO系统中使用多个位置传感器，位于执行器侧和负载侧。建议的反馈系统有两个显着的特点。一是仅用两个参数就可以同时调谐共振模态的振动抑制效果和相位稳定效果。二是共振模态的调谐对刚性模态没有影响。最后，以XY型龙门工作台为例进行仿真与实验，以验证所提出之回授控制系统的优越性。
High-precision stages are industrial equipment used in micro-fabrications. Fast and precise positioning control is a very important technology for improving the throughput and the product quality. In particular, a large-scale stage has a low resonance mode which disturbs fast and precise positioning because of the structures of the stage. In this paper, a novel feedback system is proposed in a SIMO system using multiple position sensors which are located at an actuator side and a load side. The proposed feedback system has two remarkable features. One is that the e ff ect of the vibration suppression and the phase stabilization of the resonance mode can be tuned simultaneously with only two parameters. The other is that the tuning of the resonance mode does not a ff ect the rigid mode at all. Finally, simulations and experiments with an XY -gantry-stage are performed to demonstrate the advantages of the proposed feedback control system.
影响因子：
7.7
作者：
Fujimoto, H;Hori, Y;Kawamura, A
通讯作者：
Kawamura, A