Fabrication and Characteristic Evaluation of Electret Condensor Microphone with PFA Film Lamination
Fabrication and Characteristic Evaluation of Electret Condensor Microphone with PFA Film Lamination
复制标题
PFA薄膜层压驻极体电容式麦克风的制作及特性评估
DOI：
10.1541/ieejsmas.132.10
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
H. Nagashima
中科院分区：
文献类型：
--
作者：
K. Kageyama;H. Nagashima
制备了全氟烷氧基（PFA）薄膜叠层驻极体电容式传声器（FilmECM），并在薄膜叠层传声器的差距中在叠层薄膜之间形成微间隙层，以提高差距中的电场强度和谐振频率。从1到10 kHz的平均灵敏度和单自由度系统的谐振频率进行了测量制造的FilmECM。随着差距中薄膜叠层数量的增加，薄膜电解电容器的平均灵敏度增加，而谐振频率降低。此外，通过在差距中的膜上施加氮化硼（BN）团聚体，FilmECM的平均灵敏度进一步提高。结果，其中一个制造的FilmECM的平均灵敏度为−54.5 dB（0 dB = 1 V/Pa）。此外，对于任何样品，在高达50 kHz的频率下均未观察到灵敏度的显著降低，尽管在20 kHz左右观察到灵敏度上升，这可能是由测试夹具边缘的衍射引起的。因此，FilmECM应该有一个宽带麦克风或超声波传感器的巨大潜力。
Electret condenser microphones (ECM) with perfluoroalkoxy (PFA) film lamination (FilmECMs) were fabricated and the microgap layers were formed between laminated films in the gap of FilmECM to enhance the electric field in the gap and the resonance frequency. The average sensitivity from 1 to 10 kHz and the resonance frequency of a single degree of freedom system were measured for fabricated FilmECMs. The average sensitivity of the FilmECM was increased with the increase in the number of film lamination in the gap while the resonance frequency was decreased. Moreover, the average sensitivity of FilmECM improved further by the application of boron nitride (BN) agglomerates on films in the gap. As a results, one of the fabricated FilmECMs demonstrated −54.5 dB (0 dB = 1 V/Pa) for the average sensitivity. Furthermore the significant degradation of the sensitivity was not observed up to 50 kHz for any samples though the sensitivity rising, which might be caused by the diffraction from the edge of the test fixture, was observed at around 20 kHz. Hence, FilmECM should have a great potential for a wideband mircrophone or an ultrasonic sensor.