Deposition of Co‐Cr films with large magnetization on polyethylene naphthalate tape
Deposition of Co‐Cr films with large magnetization on polyethylene naphthalate tape
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在聚萘二甲酸乙二醇酯带上沉积大磁化Co-Cr薄膜
DOI：
10.1063/1.344655
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发表时间：
1990
影响因子：
3.2
通讯作者：
M. Naoe
中科院分区：
文献类型：
--
作者：
S. Akiyama;Y. Furuto;S. Nakagawa;M. Naoe
富Co的Co-Cr薄膜由于饱和磁化强度Ms大，难以垂直取向。采用对靶溅射系统的两步溅射方法，在聚萘二甲酸乙二醇酯带衬底上连续沉积具有良好c轴取向的Co 79 Cr21底层上，可以沉积具有大Ms和垂直磁各向异性的Co 83 Cr 17薄膜。底层的存在有利于提高Co 83 Cr 17薄膜的垂直磁各向异性。
It is difficult for Co‐rich Co‐Cr film to orient its magnetization moment perpendicularly because of large saturation magnetization Ms. The two‐step sputtering method with the facing targets sputtering system was useful for depositing Co83Cr17 films with large Ms and the perpendicular magnetic anisotropy on the very thin Co79Cr21 underlayer with the good c‐axis orientation continuously on the polyethylene naphthalate tape substrate. The underlayer was helpful for improving the perpendicular magnetic anisotropy of Co83Cr17 films.