Homogeneous photonic integration of mid-infrared quantum cascade lasers with low-loss passive waveguides on an InP platform
Homogeneous photonic integration of mid-infrared quantum cascade lasers with low-loss passive waveguides on an InP platform
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DOI：
10.1364/optica.6.001023
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发表时间：
2019-08-20
期刊：
影响因子：
10.4
通讯作者：
Belkin, Mikhail A.
中科院分区：
文献类型：
--
作者：
Jung, Seungyong;Palaferri, Daniele;Belkin, Mikhail A.
低损耗无源波导平台上的中红外（中红外，lambda 约为 3-12 μm）光子集成电路对于各种中红外应用具有重要意义。量子级联激光器（QCL）是目前唯一可以在室温下在整个中红外光谱范围内连续波工作的室温电泵浦半导体光源。鉴于 QCL 有源区域的热耗散非常高，在硅平台上实现异构集成器件的长期可靠性和连续波运行具有挑战性。在这里，我们通过实验证明了中红外 QCL 与外延生长在 InP 衬底上的低损耗 In0.53Ga0.47As 无源波导的均匀集成。同质集成方法使用的材料、生长和处理步骤与传统高性能中红外 QCL 几乎相同，从而提供了光子集成电路的卓越可靠性和性能。超过 0.57 W 的峰值脉冲光功率从近似 4.6 μ m QCL 的均匀集成 n lambda 耦合到无源波导，与异质集成 QCL 获得的最佳结果相比，这代表光功率提高了一个数量级。 (C) 2019 年美国光学学会根据 OSA 开放获取出版协议条款
Mid-infrared (mid-IR, lambda approximate to 3-12 mu m) photonic integrated circuits on low-loss passive waveguide platforms are of significant interest for a wide range of mid-IR applications. Quantum cascade lasers (QCLs) are currently the only room-temperature electrically pumped semiconductor light sources that can operate in a continuous-wave at room temperature over the entire mid-IR spectral range. Given very high thermal dissipation in QCL active regions, achieving long-term reliability and continuous-wave operation of heterogeneously integrated devices on silicon platforms is challenging. Here we experimentally demonstrate homogeneous integration of mid-IR QCLs with low-loss In0.53Ga0.47As passive waveguides epitaxially grown on InP substrates. The homogeneous integration approach uses materials, growth, and processing steps nearly identical to those used for conventional high-performance mid-IR QCLs, which offers superior reliability and performance of photonic integrated circuits. Over 0.57 W of peak-pulsed optical power was coupled to the passive waveguide from a homogeneously integrated n lambda approximate to 4.6 mu m QCL, which represents an order of magnitude improvement in optical power compared to the best results obtained with heterogeneously integrated QCLs. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement