A new highly automated sputter equipment for in situ investigation of deposition processes with synchrotron radiation
A new highly automated sputter equipment for in situ investigation of deposition processes with synchrotron radiation
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DOI：
10.1063/1.4798544
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发表时间：
2013-04-01
影响因子：
1.6
通讯作者：
Roth, Stephan V.
中科院分区：
文献类型：
--
作者：
Doehrmann, Ralph;Botta, Stephan;Roth, Stephan V.
HASE（高度自动化溅射设备）是一种新的移动装置，用于研究同步辐射沉积过程。HASE是基于一个超高真空溅射沉积室，配备了一个真空样品拾取机器人。这可以在不破坏真空条件的情况下实现快速可靠的样品变化，并有助于节省宝贵的测量时间，这是在同步加速器源（如DESY的PETRA III）进行实验所需要的。安装在旋转法兰上的几个溅射枪的有利布置，使得在不同的沉积角度下溅射或在同一衬底上溅射不同的材料成为可能。该腔室还配备了一个模块化的样品台，它允许不同的样品环境的集成，如样品加热和冷却装置。HASE的设计具有独特的灵活性。结合几种不同的溅射方法，如标准溅射、掠射角溅射和高压溅射，结合样品的加热和冷却可能性、大的出口窗口和自动化程度，可以在一个装置中进行多种不同的掠入射x射线散射实验，如掠入射小角和广角x射线散射。在本文中，我们详细描述了新设备的设计和性能，并介绍了HASE设备在PETRA III的微纳焦点x射线散射光束线（MiNaXS）上的安装。此外，我们描述了测量选项，并提出了一些选择的结果。HASE设置已成功调试，现在可供用户使用。(C) 2013年美国物理研究所。[http://dx.doi.org/10.1063/1.4798544]
HASE (Highly Automated Sputter Equipment) is a new mobile setup developed to investigate deposition processes with synchrotron radiation. HASE is based on an ultra-high vacuum sputter deposition chamber equipped with an in-vacuum sample pick-and-place robot. This enables a fast and reliable sample change without breaking the vacuum conditions and helps to save valuable measurement time, which is required for experiments at synchrotron sources like PETRA III at DESY. An advantageous arrangement of several sputter guns, mounted on a rotative flange, gives the possibility to sputter under different deposition angles or to sputter different materials on the same substrate. The chamber is also equipped with a modular sample stage, which allows for the integration of different sample environments, such as a sample heating and cooling device. The design of HASE is unique in the flexibility. The combination of several different sputtering methods like standard deposition, glancing angle deposition, and high pressure sputter deposition combined with heating and cooling possibilities of the sample, the large exit windows, and the degree of automation facilitate many different grazing incidence X-ray scattering experiments, such as grazing incidence small and wide angle X-ray scattering, in one setup. In this paper we describe in detail the design and the performance of the new equipment and present the installation of the HASE apparatus at the Micro and Nano focus X-ray Scattering beamline (MiNaXS) at PETRA III. Furthermore, we describe the measurement options and present some selected results. The HASE setup has been successfully commissioned and is now available for users. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4798544]