Capillary-Force-Assisted Clean-Stamp Transfer of Two-Dimensional Materials
Capillary-Force-Assisted Clean-Stamp Transfer of Two-Dimensional Materials
复制标题
毛细管力辅助二维材料的清洗印章转移
DOI：
10.1021/acs.nanolett.7b03449
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发表时间：
2017-11-01
期刊：
影响因子：
10.8
通讯作者：
Liu, Ming
中科院分区：
文献类型：
--
作者：
Ma, Xuezhi;Liu, Qiushi;Liu, Ming
一种简单、干净的二维 (2D) 材料传输方法在 2D 电子器件的制造中发挥着至关重要的作用，特别是基于各种 2D 晶体人工垂直堆叠的异质结构器件。目前，清洁转移技术依靠牺牲层或大块晶体片（例如六方氮化硼）来拾取二维材料。在这里，我们开发了一种毛细管力辅助清洁印章技术，该技术使用一薄层蒸发液体（例如水）作为瞬间胶，以增加拾取步骤中二维晶体和聚二甲基硅氧烷（PDMS）之间的粘附能。液体蒸发后，粘附能降低，二维晶体即可释放。薄液体层从气相凝结到 PDMS 表面，这确保了 2D 材料的低污染水平，并在很大程度上保留了其化学和电学特性。利用该方法制备了低电荷中性浓度（3 X 10(10) cm(-2)）和高载流子迁移率（室温下高达48 820 cm(2) V-1 s(-1)）的石墨烯基晶体管和高运行速度的异质结构光电子器件。最后，开发了毛细管力模型来解释该实验。
A simple and clean method of transferring two-dimensional (2D) materials plays a critical role in the fabrication of 2D electronics, particularly the heterostructure devices based on the artificial vertical stacking of various 2D crystals. Currently, clean transfer techniques rely on sacrificial layers or bulky crystal flakes (e.g., hexagonal boron nitride) to pick up the 2D materials. Here, we develop a capillary-force-assisted clean-stamp technique that uses a thin layer of evaporative liquid (e.g., water) as an instant glue to increase the adhesion energy between 2D crystals and polydimethylsiloxane (PDMS) for the pick-up step. After the liquid evaporates, the adhesion energy decreases, and the 2D crystal can be released. The thin liquid layer is condensed to the PDMS surface from its vapor phase, which ensures the low contamination level on the 2D materials and largely remains their chemical and electrical properties. Using this method, we prepared graphene-based transistors with low charge-neutral concentration (3 X 10(10) cm(-2)) and high carrier mobility (up to 48 820 cm(2) V-1 s(-1) at room temperature) and heterostructure optoelectronics with high operation speed. Finally, a capillary-force model is developed to explain the experiment.