Method for the calculation of partially coherent imagery.

Method for the calculation of partially coherent imagery.
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DOI:
10.1364/ao.17.002747
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发表时间:
1978-09
期刊:
影响因子:
1.9
通讯作者:
E. Kintner
E. Kintner
中科院分区:
工程技术4区
文献类型:
--
作者:
E. Kintner

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一种使用无量纲坐标并利用傅里叶变换的性质的方法减轻了与部分相干图像计算相关的繁琐的数值计算。一维周期目标函数可以对许多实际感兴趣的对象进行建模,包括非周期对象。用传输交叉系数描述了给定光学系统的特性。对于无像差的圆形光瞳系统,包括环形光源(暗场照明),交叉系数可以解析地计算出来。对于像差或变迹系统,可以使用一维近似。还可以包括扫描显微镜像面中的卷积狭缝的影响。
The tedious numerical computations associated with the calculation of partially coherent imagery are alleviated by a method which uses dimensionless coordinates and takes advantage of the properties of the Fourier transform. A 1-D periodic object function can model many objects of practical interest, including nonperiodic objects. The properties of a given optical system are described in terms of the transmission cross coefficient. For aberration-free systems with circular pupils, including annular sources (dark-field illumination), the cross coefficient can be calculated analytically. For aberrated or apodized systems, a 1-D approximation can be used. The effect of a convolving slit in the image plane of a scanning microscope can also be included.