Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide
Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide
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采用氧化钌的悬臂式锆钛酸铅微执行器
DOI：
10.1143/jjap.39.2859
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发表时间：
2000
影响因子：
1.5
通讯作者：
D. Choi
中科院分区：
文献类型：
--
作者：
Sun;Min;Kyung;Jin;Chang;D. Choi
采用RuO2制作了一种结构简单的悬臂梁式Pb（Zr，Ti）O3 [PZT]微驱动器。RuO_2具有良好的导电性和刚度，可以将悬臂梁中的电极和支撑层的双层替换为单层。在Si衬底上沉积了RuO2、PZT和Al薄膜。通过光刻工艺进行Al的图案化，并用化学湿法蚀刻剂进行蚀刻。PZT和RuO2的蚀刻通过反应离子蚀刻系统进行。Si被各向同性地蚀刻以形成悬臂梁。所制备的悬臂梁由Al、PZT和RuO2组成，薄膜厚度分别为0.40、0.25和0.70 μm。梁的长度从140微米到275微米，所有梁的宽度都是60微米。悬臂梁的驱动倾角几乎与施加的电压成正比。
A new and simple cantilever type Pb(Zr, Ti)O3 [PZT] microactuator was fabricated by adopting RuO2. The RuO2 has reasonably good conductivity and stiffness and it can replace the double layer of electrode and supporting layer to a single layer in a cantilever beam. The RuO2, PZT and Al thin films were deposited on the Si substrate. The patterning of the Al was carried out by a lithography process and etched with a chemical wet etchant. The etching of PZT and RuO2 were performed by a reactive ion etching system. The Si was etched isotropically to form a cantilever beam. The fabricated cantilever beam consists of Al, PZT and RuO2, and the thicknesses of the films are 0.40, 0.25 and 0.70 µm, respectively. The beams were from 140 µm to 275 µm in length and all of them were 60 µm wide. Driving tilt angles of the cantilever beams were almost proportional to the applied voltages.