Anomalous electron transport in high power impulse magnetron sputtering
Anomalous electron transport in high power impulse magnetron sputtering
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DOI：
10.1088/0963-0252/17/2/025007
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发表时间：
2008-05
影响因子：
3.8
通讯作者：
D. Lundin;U. Helmersson;S. Kirkpatrick;S. Rohde;N. Brenning
中科院分区：
文献类型：
--
作者：
D. Lundin;U. Helmersson;S. Kirkpatrick;S. Rohde;N. Brenning
利用电场探针阵列研究了高功率脉冲磁控溅射(HIPIMS)等离子体中兆赫范围内的振荡电场。发生这些振荡的一个可能原因是电荷微扰--或所谓的修正双流不稳定性(MTSI)。众所周知，MTSI可以加速带电等离子体物种，并使电子在磁力线上的净输运。对这些振荡的测量证实了趋势，特别是根据MTSI波理论预期的离子质量和磁场强度对频率的依赖关系。这些结果有助于解释之前报道的HIPIMS放电中异常的快速电子传输，其中经典的利用碰撞传输电子的扩散理论已经失败。
Oscillating electric fields in the megahertz range have been studied in a high power impulse magnetron sputtering (HIPIMS) plasma with the use of electric field probe arrays. One possible reason for these oscillations to occur is charge perturbation—or so-called modified two-stream instabilities (MTSIs). It is known that MTSIs give rise to acceleration of the charged plasma species and can give a net transport of electrons across the magnetic field lines. Measurements of these oscillations confirm trends, specifically of the frequency dependence on ion mass and magnetic field strength as expected from the theory of MTSI waves. These results help to explain the previously reported anomalous fast electron transport in HIPIMS discharges, where classical theory of diffusion using collisions to transport electrons has failed.