A two-dimensional ƒ-θ micro optical lens scanner with electrostatic comb-drive XY-stage
A two-dimensional ƒ-θ micro optical lens scanner with electrostatic comb-drive XY-stage
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具有静电梳状驱动 XY 平台的二维 f-θ 微型光学透镜扫描仪
DOI：
10.1587/elex.2.542
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
H. Toshiyoshi
中科院分区：
文献类型：
--
作者：
Kazuhiro Takahashi;H. Kwon;K. Saruta;M. Mita;H. Fujita;H. Toshiyoshi
报道了一种利用硅微机械加工技术实现微光空间光调制的新型微机电XY扫描器的设计、制作和机电性能。二维平台与硅微透镜集成，以通过θ-θ透镜扫描器的机构扫描1.55微米波长的透射红外光。在30 V的驱动电压下，获得了高达± 10微米的机械位移（± 0.57度的光学角度）;光学模拟表明，该扫描器可以用于构建9输入9输出端口数的自由空间光交叉连接。
We report the design, fabrication and electromechanical performance of a newly developed micro electromechanical XY-scanner for micro-optical spatial light modulation using the silicon micromachining technology. A two-dimensional stage is integrated with a silicon micro lens to scan a transmitting infrared light of 1.55-micron-wavelength by the mechanism of the ƒ-θ lens scanner. Mechanical displacement of up to ± 10 microns (optical angle of ± 0.57 degrees) was obtained with a drive voltage of 30V; optical simulation has suggested that the scanner can be used to construct a free-space optical crossconnect of 9-input by 9-output port counts.