Discussion on the Technique of Relative Optical Interference Intensity for the Measurement of Lubricant Film Thickness
Discussion on the Technique of Relative Optical Interference Intensity for the Measurement of Lubricant Film Thickness
复制标题
相对光干涉强度测量润滑油膜厚度技术的探讨
DOI：
10.1007/s11249-009-9479-6
复制
发表时间：
2009-07
影响因子：
3.2
通讯作者：
Chenhui Zhang
中科院分区：
文献类型：
--
作者：
Liran Ma;Chenhui Zhang
提出了一种测量润滑油膜厚度的相对光干涉强度法。本文详细介绍了基于现有ROII方法的膜厚测量系统的原理和特点。一些研究者报道了使用ROII方法计算膜厚时存在很大的误差。通过对该测量技术的分辨率、精度和影响测量结果的重要因素的描述和分析，说明ROII方法只适用于多光束反射可以忽略的特定光学系统，而不适用于普通光学系统。使用ROII方法的膜厚的报告计算误差来自于使用不适当的光学系统和不适当的涂层参数。实际上，ROII方法是一种非常精确的测量薄润滑膜厚度的方法，具有0.5 nm的膜厚分辨率和1.4 μm的水平分辨率，只能用于双光束干涉系统。
The technique of relative optical interference intensity (ROII) has been developed for measuring lubricant film thickness. Here, we describe in detail the principle and the characteristics of the film thickness measurement system based on the existing ROII method. Some researchers have reported a large calculation error in film thickness with the use of ROII method. The description and analysis of the resolution, accuracy and important factors influencing the measurement results of this measurement technique presented here illustrate that the ROII method should be used in a specific optical system with negligible multiple beam reflections, but not in an ordinary one. The reported calculation error in film thickness using the ROII method comes from using an inappropriate optical system and inappropriate coating parameters. In fact, the ROII method, which is a very accurate method for measuring the thickness of a thin lubricant film, with a high resolution in film thickness of 0.5 nm and a horizontal resolution of 1.4 μm, can only be used in a two-beam interference system.
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影响因子：
2.1
作者：
JOHNSTON, GJ;WAYTE, R;SPIKES, HA
通讯作者：
SPIKES, HA
影响因子：
3.2
作者：
F. Guo;P. Wong
通讯作者：
F. Guo;P. Wong
影响因子：
--
作者：
M. Wolfe
通讯作者：
M. Wolfe
DOI：
10.1243/135065002760364822
发表时间：
2002-01-01
影响因子：
2
作者：
Guo, F;Wong, PL
通讯作者：
Wong, PL
DOI：
10.1243/pime_conf_1967_182_187_02
发表时间：
1967-09
期刊：
--
影响因子：
--
作者：
F. Westlake;A. Cameron
通讯作者：
F. Westlake;A. Cameron