Integration of bulk-quality thin film magneto-optical cerium-doped yttrium iron garnet on silicon nitride photonic substrates
Integration of bulk-quality thin film magneto-optical cerium-doped yttrium iron garnet on silicon nitride photonic substrates
复制标题
DOI：
10.1364/oe.22.025183
复制
发表时间：
2014-10-20
期刊：
影响因子：
3.8
通讯作者：
Ross, C. A.
中科院分区：
文献类型：
--
作者：
Onbasli, Mehmet C.;Goto, Taichi;Ross, C. A.
使用脉冲激光沉积在氮化硅薄膜上的钇铁石榴石 (YIG) 种子层上生长铈取代的钇铁石榴石 (Ce:YIG) 薄膜。提出了在氮化硅上形成石榴石薄膜的最佳工艺条件。在 640 摄氏度和 2 Hz 脉冲速率下快速热退火的 40 纳米厚 YIG 上，观察到在 640 摄氏度下生长的 160 纳米厚 Ce: YIG 薄膜的体磁或近体磁和磁光特性。研究了生长温度和沉积速率对结构、磁和磁光性质的影响。 (C) 2014年美国光学学会
Cerium substituted yttrium iron garnet (Ce:YIG) films were grown on yttrium iron garnet (YIG) seed layers on silicon nitride films using pulsed laser deposition. Optimal process conditions for forming garnet films on silicon nitride are presented. Bulk or near-bulk magnetic and magneto-optical properties were observed for 160 nm thick Ce: YIG films grown at 640 degrees C on rapid thermal annealed 40 nm thick YIG grown at 640 degrees C and 2 Hz pulse rate. The effect of growth temperature and deposition rate on structural, magnetic and magneto-optical properties has been investigated. (C) 2014 Optical Society of America