MEMS-micropumps: A review
MEMS-micropumps: A review
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DOI：
10.1115/1.1459075
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发表时间：
2002-06-01
影响因子：
2
通讯作者：
Chuan, TK
中科院分区：
文献类型：
--
作者：
Nguyen, NT;Huang, XY;Chuan, TK
微流控技术是MEMS技术的重要研究领域，具有广阔的市场前景。本文对微流控系统中最重要的微流控元件之一--微泵进行了综述。在过去的十年里，人们开发了各种微型泵。关于微流控器件的综述文章很少，没有一篇是专门针对微泵的。本文系统地概述了泵的原理及其MEMS技术的实现。关于泵的尺寸，流速和背压的比较将帮助读者决定重新启动微流体项目的适当设计。不同的泵的原则进行了比较，并讨论了图形方面的优势和劣势，为特定的应用。
Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives all overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There arc only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding Pump size, flow rate, and back-pressure will help readers to decide their proper design be re starting a microfluidics project. Different pump principles arc compared graphically and discussed in terms of their advantages and disadvantages for particular applications.