Influence of the wafer chuck on integrated antenna measurements
Influence of the wafer chuck on integrated antenna measurements
复制标题
晶圆卡盘对集成天线测量的影响
DOI：
--
复制
发表时间：
2016
期刊：
影响因子：
--
通讯作者：
C. Waldschmidt
中科院分区：
文献类型：
--
作者：
L. Boehm;Markus Hehl;C. Waldschmidt
为了对集成天线进行有意义的方向图测量，需要对测量过程中所需的设备进行优化，以尽可能少地影响测量结果。在本文中所造成的误差的卡盘上的反射进行了调查和量化。建造了一个塑料卡盘来减少反射源，从而提高设置的整体精度。新卡盘在扫描角度和频率上产生的波纹更小，因此显著提高了设置的性能。
For meaningful pattern measurements of integrated antennas the devices, which are required during the measurement process, need to be optimized to influence the measurement results as little as possible. In this paper the errors caused by reflections on the chuck are investigated and quantified. A plastic chuck was built to reduce sources of reflection and thus improve the overall accuracy of the setup. The new chuck causes less ripples over the scanning angle and over the frequency and therefore, increases the performance of the setup significantly.