Gas Sensing Characteristics of a WO3 Thin Film Prepared by a Sol-Gel Method
Gas Sensing Characteristics of a WO3 Thin Film Prepared by a Sol-Gel Method
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DOI：
10.3390/proceedings2130723
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发表时间：
2018-12
期刊：
影响因子：
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通讯作者：
M. Yano;T. Iwata;S. Murakami;R. Kamei;Taichi Inoue;K. Koike
中科院分区：
文献类型：
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作者：
M. Yano;T. Iwata;S. Murakami;R. Kamei;Taichi Inoue;K. Koike
报道了一种WO_3基薄膜气敏元件的制备和表征。利用偏钨酸铵水合物和聚乙烯醇的混合水溶液，采用溶胶-凝胶法在抛光氧化铝衬底上制备了WO_3薄膜，并在其表面形成叉指电极，制成气敏元件。通过测量NO、H2和NH3环境中的电阻随气体浓度的变化来进行表征。结果表明，该传感器对NO具有特定的灵敏度，虽然被认为是还原气体，但被检测为氧化性气体，其电阻随气体浓度的变化符合朗缪尔等温线。
Preparation and characterization of a WO3-based thin film gas sensor are reported. The WO3 film was prepared on a polished alumina substrate by a sol-gel method using an aqueous mixture solution of ammonium metatungstate hydrate and poly-vinyl alcohol, and fabricated into the gas sensor by forming interdigital electrodes on the surface. The characterization was conducted by measuring the electrical resistance change in NO, H2, and NH3 ambient as a function of gas concentration. It is revealed that the sensor has a specific sensitivity to NO, NO is detected as oxidizing gas although it is expected to be reducing gas, and the resistance changes with gas concentration in accordance with the Langmuir isotherm plot.