Single mask, large force, and large displacement electrostatic linear inchworm motors
Single mask, large force, and large displacement electrostatic linear inchworm motors
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DOI：
10.1109/jmems.2002.800937
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发表时间：
2001-01
期刊：
影响因子：
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通讯作者：
R. Yeh;S. Hollar;K. Pister
中科院分区：
文献类型：
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作者：
R. Yeh;S. Hollar;K. Pister
我们展示了一系列大力、大位移静电线性尺蠖电机，可以在中等到高电压下运行。尺蠖电机设计将执行器力与总行程解耦，并允许使用静电间隙闭合执行器来实现大力和大位移，同时消耗低功耗。典型的尺蠖电机的尺寸为 3 毫米/spl 次/1 毫米/spl 次/50/spl mu/m，可以举起超过其自身重量 130 倍的物体。一台电机在 33 V 时实现了 80 /spl mu/m 的行程和 260 /spl mu/N 的计算力。该电机在 33 V 时的力密度为 87 /spl mu/N/mm/sup 2/ ，能源效率估计为 8%。另一台电机以近 4 毫米/秒的平均速度移动梭子，并实现了 190 W/m/sup 3/ 的估计功率密度。电机在无粘滞的情况下循环了 2360 万次，时间超过 13.5 小时。该系列电机仅使用单个掩模在绝缘体上硅晶圆上制造。
We have demonstrated a family of large force and large displacement electrostatic linear inchworm motors that can operate with moderate to high voltages. The inchworm motor design decouples actuator force from total travel and allows the use of electrostatic gap-closing actuators to achieve large force and large displacement while consuming low power. A typical inchworm motor measures 3 mm/spl times/1 mm/spl times/50 /spl mu/m and can lift over 130 times its own weight. One motor has achieved a travel of 80 /spl mu/m and a calculated force of 260 /spl mu/N at 33 V. The force density of that motor was 87 /spl mu/N/mm/sup 2/ at 33 V and the energy efficiency was estimated at 8%. Another motor displaced the shuttle at an average velocity of almost 4 mm/s and achieved an estimated power density of 190 W/m/sup 3/. Motors were cycled 23.6 million times for over 13.5 hours without stiction. This family of motors is fabricated on Silicon-on-Insulator wafers using only a single mask.