The structure of Cu-Al films prepared by unbalanced DC magnetron sputtering
The structure of Cu-Al films prepared by unbalanced DC magnetron sputtering
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DOI:
10.1016/s0257-8972(97)00357-5
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发表时间:
1997-11
影响因子:
5.4
通讯作者:
J. Musil;A. Bell;M. Čepera;J. Zeman
中科院分区:
文献类型:
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作者:
J. Musil;A. Bell;M. Čepera;J. Zeman