A turbulent flow model for the rf inductively coupled plasma
A turbulent flow model for the rf inductively coupled plasma
复制标题
射频电感耦合等离子体的湍流模型
DOI：
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发表时间：
1989
期刊：
影响因子：
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通讯作者：
M. Boulos
中科院分区：
文献类型：
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作者：
M. El;J. Mostaghimi;M. Boulos
给出了射频感应等离子体中湍流流动和能量传递的数学表达式。通过求解二维旋转对称湍流N-S方程以及电场和磁场的能量方程和一维麦克斯韦方程，得到了流场和温度场。湍流粘性采用标准k-e模型确定。给出了大气条件下的Ar等离子体的计算结果。讨论了射频等离子体中湍流流动的不同方面及其意义。结果表明，在同一流场中同时存在层流和湍流区。等离子体气体中的漩涡效应是增加了火炬内的整体湍流度。
A mathematical representation is given for the turbulent fluid flow and energy transfer in an rf induction plasma. The flow and temperature fields are obtained through the solution of the two‐dimensional rotationally symmetric turbulent Navier–Stokes equations along with the energy and the one‐dimensional Maxwell’s equations for the electric and magnetic fields. The turbulent viscosity is determined using the standard k‐e model. Results are given for an argon plasma under atmospheric conditions. Different aspects of turbulent flows and their implications in rf plasmas are discussed. The results indicate the presence of both laminar and turbulent regimes in the same flow field. The effect of swirl in the plasma gas is to increase the overall turbulence level in the torch.