Structural and mechanical properties of amorphous-carbon films produced by high-fluence metallic ion implantation into polyimide
Structural and mechanical properties of amorphous-carbon films produced by high-fluence metallic ion implantation into polyimide
复制标题
高通量金属离子注入聚酰亚胺制备的非晶碳薄膜的结构和机械性能
DOI:
10.1016/s0257-8972(02)00257-8
复制
发表时间:
2002
影响因子:
5.4
通讯作者:
M. Iwaki
中科院分区:
文献类型:
--
作者:
Tomohiro Kobayashi;A. Nakao;M. Iwaki