Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
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DOI：
10.1063/1.1642738
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发表时间：
2004-03-01
影响因子：
3.2
通讯作者：
Roukes, ML
中科院分区：
文献类型：
--
作者：
Ekinci, KL;Yang, YT;Roukes, ML
现在可以实现纳米机械谐振器，其实现超过1GHz的基本谐振频率，其中品质因数（Q）在小于或等于Q的范围内。这些器件的极小的有效质量，加上它们的高Q，转化为前所未有的惯性质量灵敏度。这使得它们成为各种质量传感应用的自然候选者。在这里，我们评估的最终质量灵敏度限制纳米机械谐振器在真空中工作，所施加的一些基本的物理噪声过程。我们的分析表明，纳米机械谐振器提供了巨大的潜力，质量传感最终在单个分子的水平上的分辨率。(C)2004年，美国物理学会。
Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 10(3)less than or equal toQless than or equal to10(5). The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo that are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing-ultimately with resolution at the level of individual molecules. (C) 2004 American Institute of Physics.