Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis
Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis
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DOI：
10.1007/s00542-013-1771-6
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发表时间：
2014-02
期刊：
影响因子：
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通讯作者：
Liangliang He;M. Toda;Y. Kawai;H. Miyashita;M. Omori;T. Hashida;R. Berger;T. Ono
中科院分区：
文献类型：
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作者：
Liangliang He;M. Toda;Y. Kawai;H. Miyashita;M. Omori;T. Hashida;R. Berger;T. Ono
提出了一种制备碳纳米管-碳复合微结构的方法。在惰性气氛下，在约600 °C的温度下，将SU-8光刻胶与1wt%的CNT混合，通过热解工艺制备了尺寸从10 μ m到几百μ m的CNT-碳复合微结构。通过这种新的制造方法可以成功地制造出具有约34的高纵横比的复合微结构。这项研究提供了一种简单的方法，是兼容的微制造技术，并能够制造复合材料的微结构与可再现的形状和尺寸，在所需的位置。这种方法具有潜在的进一步探索复合微/纳米结构作为功能单元在各种微器件中的应用。纳米压痕法测量了碳纳米管复合薄膜的超显微压痕硬度。
A fabrication method of carbon nanotube (CNT)-carbon composite microstructures has been developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to several hundred micrometers have been fabricated by pyrolysis process from the patterned SU-8 photoresist mixed with 1 wt% of CNTs at temperature of ~600 °C under inert atmosphere. The resulting composite microstructures with a high aspect ratio of ~34 can be successfully fabricated by this novel fabrication method. This research provides a simple approach that is compatible with microfabrication technology and is capable of fabricating composite microstructures with reproducible shape and dimensions, at desired locations. This approach has potential for the further exploring of applications of composite micro/nano structures as functional units in various microdevices. Also the ultramicroindentation hardness of the CNT-carbon composite films was investigated by nanoindentation measurement.