Development of High Performance EUV Light Source by Laser Produced Plasma-Target Design and Evaluation of EUV Conversion Efficiency-

Development of High Performance EUV Light Source by Laser Produced Plasma-Target Design and Evaluation of EUV Conversion Efficiency-
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通过激光产生等离子体开发高性能 EUV 光源 - 靶材设计和 EUV 转换效率评估 -

DOI：
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发表时间：
2006
期刊：
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology
影响因子：
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通讯作者：
Y.Oshikane
Y.Oshikane
中科院分区：
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文献类型：
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作者：
T.Yoshikawa;Y.Otani;M.Nakano;T.Kataoka;H.Inoue;Y.Oshikane

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