Electrostatically coupled vibration modes in unimorph complementary microcantilevers
Electrostatically coupled vibration modes in unimorph complementary microcantilevers
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DOI：
10.1063/1.3697647
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发表时间：
2012-03
影响因子：
4
通讯作者：
V. Lebedev;N. Heidrich;F. Knoebber;R. E. Sah;W. Pletschen;B. Raynor;V. Polyakov;V. Cimalla;O. Ambacher
中科院分区：
文献类型：
--
作者：
V. Lebedev;N. Heidrich;F. Knoebber;R. E. Sah;W. Pletschen;B. Raynor;V. Polyakov;V. Cimalla;O. Ambacher
为了扩展射频器件的调谐能力，通常采用耦合的微机电系统。在这封信中，我们展示了压电致动，电调谐谐振器系统的基础上耦合微机械振荡器在弯曲振动模式下工作。由于在单个谐振器条之间实现了100-200 nm的横向纳米间隙，实现了静电耦合的显著增强。这允许谐振器同步和相对于其初始值超过两倍的精确系统频率调谐。此外，一个简单的机电模型已被开发来描述的静电耦合振荡器的动态行为。
To extend the tuning capabilities of radio frequency devices, coupled microelectromechanical systems are often employed. In this letter, we demonstrate piezoelectrically actuated, electrically tuneable resonator systems based on coupled micromechanical oscillators operating in a flexural vibration mode. The substantial enhancement in electrostatic coupling was achieved due to the implementation of lateral nanogaps of 100-200 nm between single resonator bars. This allows for resonator synchronization and precise system frequency tuning by over a factor of two, relative to its initial value. Additionally, a simple electro-mechanical model has been developed to describe the dynamic behavior of the electrostatically coupled oscillators.