A Tunable Hybrid Electro-magnetomotive NEMS Device for Low Temperature Physics
A Tunable Hybrid Electro-magnetomotive NEMS Device for Low Temperature Physics
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用于低温物理的可调谐混合电磁动 NEMS 装置
DOI：
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发表时间：
2011
期刊：
影响因子：
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通讯作者：
H. Godfrin
中科院分区：
文献类型：
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作者：
E. Collin;T. Moutonet;J. Heron;O. Bourgeois;Yurij;H. Godfrin
微加工技术已经使得实现具有微米和纳米尺度域中的尺寸的机械装置成为可能。在低温下，人们可以在良好控制的条件下操作和研究这些装置，即低电噪声和低温真空，具有使用高磁场和超导涂层金属的能力（柯林等人，J.低温150（5-6）：739，2008）。此外，温度原来是一个控制参数的机械耗散过程的实验研究，与低温环境，确保只有低能量状态的热填充。浸没在量子流体中，这些MEMS和NEMS装置（微米和纳米机电系统）可以以比“经典”技术更高的频率和更好的分辨率以更小的尺度探测液体的激发（Triqueneaux等人，Physica B 284：2141，2000）。我们目前的实验结果在真空中获得的悬臂NEMS结构，可以磁动和静电驱动。该设备是非常敏感的解决位移低至1毫米，使用传统的室温电子。它在现场校准，频率/非线性可以静电调谐。设计应允许使用参数放大。
Microfabrication techniques have made possible the realization of mechanical devices with dimensions in the micro- and nano-scale domain. At low temperatures, one can operate and study these devices in well-controlled conditions, namely low electrical noise and cryogenic vacuum, with the ability to use high magnetic fields and superconducting coating metals (Collin et al. in J. Low Temp. Phys. 150(5–6):739, 2008). Moreover, the temperature turns out to be a control parameter in the experimental study of mechanical dissipation processes, with the cryogenic environment ensuring that only low energy states are thermally populated. Immersed in a quantum fluid, these MEMS and NEMS devices (micro and nano electro-mechanical systems) can probe the excitations of the liquid at a smaller scale, with higher frequencies and better resolution than “classical” techniques (Triqueneaux et al. in Physica B 284:2141, 2000). We present experimental results obtained in vacuum on cantilever NEMS structures which can be both magnetomotive and electrostatically driven. The device is extremely sensitive with resolved displacements down to 1 Å using conventional room-temperature electronics. It is calibrated in situ, and frequency/non-linearity can be tuned electrostatically. The design should allow parametric amplification to be used.