A new phase and optical properties of the N-doped ZnO film
A new phase and optical properties of the N-doped ZnO film
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DOI：
10.1016/j.materresbull.2010.06.008
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发表时间：
2010-09
影响因子：
5.4
通讯作者：
Yue Zhao;Z. Li;Z. Lv;X. Liang;J. Min;Lingjun Wang;Ying Shi
中科院分区：
文献类型：
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作者：
Yue Zhao;Z. Li;Z. Lv;X. Liang;J. Min;Lingjun Wang;Ying Shi
本文采用湿化学法制备了不同掺杂浓度的氮掺杂ZnO薄膜。通过 PL 光谱、拉曼光谱、光学反射和 XRD 测量对这些 ZnO 薄膜进行了研究。 XRD结果表明，重掺杂ZnO薄膜中出现了新相。此外，拉曼峰的小幅移动表明这些 ZnO 薄膜中存在应力。这导致ZnO薄膜晶格无序并出现新的ZnO相。
In the present paper, the nitrogen-doped ZnO thin films with variable doping levels were produced by using wet chemical process. These ZnO films were investigated by PL spectrum, Raman spectrum, optical reflection and XRD measurement. The XRD result showed that a new phase appeared in the heavy-doped ZnO films. In addition, the small shift of the Raman peak indicated that the stress existed in these ZnO films. This resulted in the disorder of the lattice of the ZnO film and the appearance of new ZnO phase.