Sandwich type ferromagnetic RF integrated inductor
Sandwich type ferromagnetic RF integrated inductor
复制标题
DOI：
10.1109/22.971617
复制
发表时间：
2001-05
期刊：
影响因子：
--
通讯作者：
M. Yamaguchi;R. Baba;K. Arai
中科院分区：
文献类型：
--
作者：
M. Yamaguchi;R. Baba;K. Arai
首次展示了 2 GHz 范围内三明治型铁磁 RF 集成螺旋电感器的微加工。两个铁磁 CoNbZr 薄膜将螺旋夹在中间，以增强线圈电流上的磁通链。对于 f=2 GHz 时 200 /spl mu/m/spl 次/400 /spl mu/m 尺寸的 4 匝矩形螺旋，获得了 7.9 nH 的电感 L 和 12.7 的合格因数 Q。电感量比相同线圈尺寸的空芯好19%，Q值好23%。
The first microfabrication of a sandwich type ferromagnetic RF integrated spiral inductor for the 2 GHz range is demonstrated. The two ferromagnetic CoNbZr films sandwich the spiral to enhance the magnetic flux linkage across the coil current. The inductance, L, of 7.9 nH and the qualify factor, Q, of 12.7 were obtained for a 200 /spl mu/m/spl times/400 /spl mu/m size 4-turn rectangular spiral at f=2 GHz. The inductance was better than that of an air core of the same coil size by 19%, and the Q was better by 23%.