Modeling, design and testing of the electrostatic shuffle motor
Modeling, design and testing of the electrostatic shuffle motor
复制标题
静电洗牌电机的建模、设计和测试
DOI：
10.1016/s0924-4247(98)00129-0
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发表时间：
1998
影响因子：
4.6
通讯作者：
M. Elwenspoek
中科院分区：
文献类型：
--
作者：
N. Tas;J. Wissink;L. Sander;T. Lammerink;M. Elwenspoek
洗牌电机是一种线性静电步进电机，采用机械变换来获得大的力和小的步骤。已经建立了一个模型来计算作为负载力和电机几何形状的函数的步长和驱动电压。该电机由三个多晶硅层，并已制造使用表面微机械加工。测试表明，在40 V驱动电压下，有效步长约为85 nm，产生的力为43 μN。
The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.