Highly Stretchable Electrodes on Wrinkled Polydimethylsiloxane Substrates.
Highly Stretchable Electrodes on Wrinkled Polydimethylsiloxane Substrates.
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褶皱聚二甲基硅氧烷基底上的高拉伸电极
DOI：
10.1038/srep16527
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发表时间：
2015-11-20
影响因子：
4.6
通讯作者：
Zhang W
中科院分区：
文献类型：
--
作者：
Tang J;Guo H;Zhao M;Yang J;Tsoukalas D;Zhang B;Liu J;Xue C;Zhang W
介绍了一种应用于高拉伸无线传感器的银起皱电极的制备技术。在经O2plasma和表面化学功能化工艺处理的预应变和松弛聚二甲基硅氧烷（PDMS）衬底上真空沉积银起皱薄膜，其应变极限可达200%，表面附着面积可达95%。由这种银导体制成的电阻、电感和电容器等元件的电气特性在拉伸下保持稳定，表现出较低的温度和湿度系数。该技术随后被用于无线可穿戴电子设备，使用与现有微/纳米制造技术兼容的加工。
This paper demonstrates a fabrication technology of Ag wrinkled electrodes with application in highly stretchable wireless sensors. Ag wrinkled thin films that were formed by vacuum deposition on top of pre-strained and relaxed polydimethylsiloxane (PDMS) substrates which have been treated using an O2plasma and a surface chemical functionalization process can reach a strain limit up to 200%, while surface adhesion area can reach 95%. The electrical characteristics of components such as resistors, inductors and capacitors made from such Ag conductors have remained stable under stretching exhibiting low temperature and humidity coefficients. This technology was then demonstrated for wireless wearable electronics using compatible processing with established micro/nano fabrication technology.