Structural analysis of diamond/silicon heterointerfaces fabricated by surface activated bonding at room temperature

Structural analysis of diamond/silicon heterointerfaces fabricated by surface activated bonding at room temperature
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室温下表面活化键合制备的金刚石/硅异质界面的结构分析

DOI:
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发表时间:
2021
期刊:
影响因子:
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通讯作者:
Shigekawa Naoteru
Shigekawa Naoteru
中科院分区:
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文献类型:
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作者:
Ohno Yutaka;Liang Jianbo;Yoshida Hideto;Shimizu Yasuo;Nagai Yasuyoshi;Shigekawa Naoteru

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