Using a light microscope to measure motions with nanometer accuracy
Using a light microscope to measure motions with nanometer accuracy
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DOI：
10.1117/1.601967
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发表时间：
1998-04-01
影响因子：
1.3
通讯作者：
Freeman, DM
中科院分区：
文献类型：
--
作者：
Davis, CQ;Freeman, DM
介绍了一种测量微观结构纳米级运动的系统。利用光学显微镜、CCD相机和频闪照明器获得目标的停止动作图像。使用计算机视觉算法直接从测量图像确定运动。使用该系统的运动测量的准确性进行评估，使用一个移动的目标与校准位移。在我们最佳的条件下以及一些次优的条件下，说明了重要的降解机制的标本，确定准确度。测量的误差进行比较的理论模型的计算机模拟的基础上的预测。结果表明，最重要的硬件因素包括基板振动和相机的缺陷。最佳硬件条件下的测量误差主要是由于计算机视觉算法中的系统偏差。在我们最优化的条件下，该系统可以分辨小至纳米的运动。因此，运动测量中的误差与用于获得图像的光的波长和视频显微镜的像素间距相比是小的。(C)1998年，美国光电仪器工程师学会。
A system for measuring nanometer motions of microscopic structures is demonstrated. Stop-action images of a target are obtained with a light microscope, CCD camera, and stroboscopic illuminator. Motions are determined directly from measured images using algorithms from computer vision. The accuracy of motion measurements using the system is assessed using a moving target with calibrated displacements. Accuracy is determined for specimens viewed under our most optimal conditions as well as for a number of suboptimal conditions that illustrate important degradation mechanisms. Measured errors are compared to predictions based on computer simulations of theoretical models. Results show that the most important hardware factors include substrate vibrations and camera imperfections. Measurement errors for the most optimal hardware conditions are primarily due to systematic bias in the computer vision algorithms. For our most optimal conditions, the system can resolve motions as small as nanometers. Thus, errors in motion measurements are small compared to both the wavelength of the light used to obtain the images and the pixel spacing of the video microscope. (C) 1998 Society of Photo-Optical instrumentation Engineers.