A detailed 3D-NEGF simulation study of tunnelling in n-Si nanowire MOSFETs

A detailed 3D-NEGF simulation study of tunnelling in n-Si nanowire MOSFETs
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n-Si 纳米线 MOSFET 中隧道效应的详细 3D-NEGF 模拟研究

DOI:
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发表时间:
2010
期刊:
2010 Silicon Nanoelectronics Workshop
影响因子:
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通讯作者:
A. Asenov
A. Asenov
中科院分区:
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文献类型:
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作者:
A. Martinez;N. Seoane;A. Brown;A. Asenov

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在这项工作中,我们计算了两种不同横截面(2.2×2.2 和 4.2×4.2 nm<sup>2</sup>)和五种不同沟道长度(4、6、10、12、14 nm)的隧道效应对通断电流的影响。模拟的 Si NWT 晶体管具有未掺杂的沟道、0.8 nm SiO<inf>2</inf> 氧化物和 9 nm 源极/漏极区域,掺杂浓度为 10<sup>20</sup>cm<sup>-3</sup>。这项工作中的所有模拟都是在室温下进行的。考虑了两种不同的漏极电压,并模拟了完整的 Id-Vg 特性。由于横截面的变化,我们的模拟中使用了来自 sp<sup>3</sup>d<sup>5</sup> 第二邻基紧束缚计算 [6] 的厚度相关有效质量。
In this work we have computed the effect of tunnelling on the on- and off-currents for two different cross-sections (2.2×2.2 & 4.2×4.2 nm<sup>2</sup>) and for five different channel lengths (4, 6, 10, 12, 14 nm). The simulated Si NWT transistors have undoped channels, 0.8 nm SiO<inf>2</inf> oxide and 9 nm source/drain regions doped at 10<sup>20</sup>cm<sup>−3</sup>. All the simulations in this work have been performed at room temperature. Two different drain voltages have been consider for which full Id-Vg characteristics were simulated. Due to the change in cross-section, thickness dependent effective masses from sp<sup>3</sup>d<sup>5</sup> second-neighbour-basis tight-binding calculations [6] are used in our simulations.