Development of X-ray diffractometer for in-situ observation of thin-film crystal growth equipped with focusing monochromator
Development of X-ray diffractometer for in-situ observation of thin-film crystal growth equipped with focusing monochromator
复制标题
配备聚焦单色仪的薄膜晶体生长原位观察X射线衍射仪的研制
DOI：
10.1002/pssc.201000508
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
and Y. Takeda
中科院分区：
文献类型：
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作者：
H. Tameoka;T. Kawase;M. Tabuchi;and Y. Takeda
X射线晶体截断棒散射测量是X射线衍射/散射测量的一种，是定量、无损分析界面结构的一种非常强大的技术。X射线CTR散射测量可以在原子尺度上揭示层厚度、原子分布、表面粗糙度和晶格常数。在我们以前的工作中，同步辐射（SR）被用作测量的X射线源，因为通常认为强X射线是测量非常弱的CTR散射信号所必需的。在这项工作中，使用传统的X射线源，即，通过在300 mA和50 kV下运行的旋转阳极X射线发生器，我们成功开发了可用于X射线CTR散射测量的X射线衍射仪。关键部件是Johansson单色仪，用于开发衍射仪。Johansson单色仪用于将X射线聚焦在样品位置（以使入射X射线发散角）并使Cu-K α单色化。通过使用Johansson单色仪和2D探测器，用发散入射X射线束照射样品，同时检测散射X射线。为了抑制噪声，引入了索勒狭缝。采用索勒狭缝，大大抑制了噪声，光谱得到了显著改善。无需移动X射线源、样品和探测器，新开发的衍射仪就可以获得晶体的倒易空间图，大大缩短了测量时间。（© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA，魏因海姆）
X‐ray crystal truncation rod scattering measurement is a kind of X‐ray diffraction/scattering measurement, which is a very powerful technique to analyze interface structures quantitatively and non‐destructively. The X‐ray CTR scattering measurement can reveal layer thicknesses, distributions of atoms, surface roughness, and lattice constants at an atomic‐scale. In our previous works, synchrotron radiation (SR) has been utilized as an X‐ray source for the measurement, since it is generally considered that a strong X‐ray is necessary to measure the very weak CTR scattering signal. In this work, using a conventional X‐ray source, i.e., rotating anode X‐ray generator operated at 300 mA and 50 kV, we successfully developed an X‐ray diffractometer that can be used for the X‐ray CTR scattering measurement. The key component was a Johansson monochromator to develop the diffractometer. The Johansson monochromator was utilized both to focus X‐ray at a sample position (to make divergence angle of the incident X‐rays) and to monochromatize Cu‐Kα. By using the Johansson monochromator and a 2D‐detector, a sample was irradiated by a diverging incident X‐ray beam and the scattered X‐ray was detected at the same time. In order to suppress the noise, a Soller slit was introduced. The noise was greatly suppressed and spectrum was drastically improved by using the Soller slit. Without moving the X‐ray source, the sample, nor the detector, a reciprocal space map of a crystal can be obtained by the newly developed diffractometer, and it reduced the measurement time drastically. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)