Different Fermi-level pinning positions between epitaxial and rotational Al/Si interfaces.

Different Fermi-level pinning positions between epitaxial and rotational Al/Si interfaces.
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外延和旋转 Al/Si 界面之间不同的费米能级钉扎位置。

DOI:
10.1103/physrevb.50.4893
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发表时间:
1994
期刊:
Physical review. B, Condensed matter
影响因子:
--
通讯作者:
Hirose
Hirose
中科院分区:
--
文献类型:
--
作者:
Miura;Fujieda;Hirose

文献摘要

被引文献

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研究了Al/Si紧密接触的肖特基势垒高度(SBH)与界面晶体学取向的关系,并通过透射电子显微镜观察到。利用分子束低温外延技术,通过控制表面结构,在Si(111)和(100)面上分别获得了Al的外延和旋转薄膜。对n型和p型样品的SBH测量表明,在界面处缺乏外延对准显著降低了(111)和(100)表面上接触的费米能级钉扎位置。
Schottky-barrier height (SBH) for intimate Al/Si contacts is investigated in relation to the interfacial crystallographic alignment, which is observed by transmission-electron microscopy. Epitaxial and rotational Al films are obtained by low-temperature molecular-beam epitaxy on both Si (111) and (100) surfaces, by controlling the surface structures. The SBH measurements for n-and p-type samples reveal that the absence of epitaxial alignment at the interfaces significantly lowers the Fermi-level pinning position for the contacts on both (111) and (100) surfaces.