Development of superconducting tunnel junction X-ray detector with high absorption yields utilizing silicon pixel absorber
Development of superconducting tunnel junction X-ray detector with high absorption yields utilizing silicon pixel absorber
复制标题
利用硅像素吸收体开发具有高吸收产率的超导隧道结X射线探测器
DOI：
10.1007/s10909-016-1537-5
复制
发表时间：
2016
影响因子：
2
通讯作者：
Masataka Ohkubo
中科院分区：
文献类型：
--
作者：
Shigetomo Sjiki;Go Fujii;Masahiro Ukibe;Masataka Ohkubo
A superconducting tunnel junction (STJ) array detector along with silicon pixel absorbers (STJ–SPA) is fabricated to achieve high detection efficiency at X-ray energies below 10 keV. The STJ pixels have dimensions of 100m100m and are composed of Nb–Al/AlO/Al–Nb thin layers. The SPAs are also 100m100m and have a depth of 400m, and are isolated from each other by a deep trench with a depth of 350m. The detection efficiency of the STJ–SPA exceeds 95 % at X-ray energies below 10 keV, and its energy resolution is 82 eV FWHM, as measured at the Si Kline at 1740 eV. By means of the STJ–SPA detector, the X-ray absorption spectrum of the light element sulfur with a concentration of less than 0.1 wt% in a soda-lime glass sample was successfully acquired.
