Magnetic-field measurements using an integrated resonant magnetic-field sensor
Magnetic-field measurements using an integrated resonant magnetic-field sensor
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DOI：
10.1016/s0924-4247(98)00143-5
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发表时间：
1998-10-30
影响因子：
4.6
通讯作者：
Mollinger, JR
中科院分区：
文献类型：
--
作者：
Kadar, Z;Bossche, A;Mollinger, JR
本文介绍了一种基于谐振式单晶硅结构的磁场传感器。谐振器的激励是通过由流过沉积在结构表面上的矩形线圈的正弦电流产生的洛伦兹力来实现的。与磁场成比例的振动幅度由传感电容器检测。由于谐振器的高品质因数，当器件被真空封装时，可以实现1 nT或甚至更小的检测下限。本文介绍了它的工作原理、制作过程以及开环和闭环测量结果。(C)1998年Elsevier Science S.A. All rights reserved.
The present paper introduces a magnetic-field sensor based on a resonating single-crystal silicon structure. The excitation of the resonator is achieved by the Lorentz force generated by a sinusoidal current flowing through a rectangular coil deposited on the surface of the structure. The amplitude of the vibration, which is proportional to the magnetic field, is detected by sensing capacitors. Because of the high-quality factor of the resonator, a lower detection limit of 1 nT, or even smaller might be realised when the device is vacuum-packaged. This paper describes the working principle, the fabrication procedure as well as open- and closed-loop measurement results. (C) 1998 Elsevier Science S.A. All rights reserved.