Sub-ppm detection of vapors using piezoresistive microcantilever array sensors
Sub-ppm detection of vapors using piezoresistive microcantilever array sensors
复制标题
DOI：
10.1088/0957-4484/20/1/015501
复制
发表时间：
2009-01-07
期刊：
影响因子：
3.5
通讯作者：
Gerber, Christoph
中科院分区：
文献类型：
--
作者：
Yoshikawa, Genki;Lang, Hans-Peter;Gerber, Christoph
微制造的压阻悬臂梁阵列传感器的性能进行了评估，使用各种蒸气的挥发性有机化合物，包括烷烃具有不同的链长从5（正戊烷）到14（正十四烷）。我们表明，压阻式微悬臂梁阵列传感器具有区分个别烷烃在一个同源系列，以及常见的挥发性有机化合物，根据主成分分析的选择性。我们开发了一种新的方法来评估的灵敏度，利用较长的链烷烃，如正十二烷，正十三烷和正十四烷，在饱和蒸汽条件下的低蒸气压。该方法揭示了亚ppm的灵敏度和悬臂梁响应被发现遵循蒸发的分析物的质量，使用基于朗缪尔蒸发模型的定量模型计算。
The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that piezoresistive microcantilever array sensors have the selectivity of discriminating individual alkanes in a homologous series as well as common volatile organic compounds according to principal component analysis. We developed a new method to evaluate the sensitivity, taking advantage of the low vapor pressures of alkanes with longer chains, such as n-dodecane, n-tridecane and n-tetradecane, under saturated vapor conditions. This method reveals sub-ppm sensitivity and the cantilever response is found to follow the mass of evaporated analytes as calculated using a quantitative model based on the Langmuir evaporation model.