A MEMS conical spring actuator array
A MEMS conical spring actuator array
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DOI：
10.1109/jmems.2004.839345
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发表时间：
2005-04
影响因子：
2.7
通讯作者：
T. Fukushige;S. Hata;A. Shimokohbe
中科院分区：
文献类型：
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作者：
T. Fukushige;S. Hata;A. Shimokohbe
提出了一种新的MEMS锥形弹簧作动器阵列。在此之前，我们已经开发出在面外方向具有长行程（180 /spl mu/m）的锥形弹簧微执行器。然而，最大输出力和填料密度都不能令人满意。本文建立了圆锥弹簧的力学模型和电气模型，用以计算最大输出力和驱动电压。利用这些模型对作动器的几何参数进行了优化，导出了新的作动器几何形状。新的几何结构采用了更宽更厚的弹簧，将最大输出力从0.087 mN增加到0.83 mN。使用额外的互连层，包装密度增加到1个致动器/mm/sup 2/。此外，采用较薄的绝缘层降低了驱动电压。交流驱动器的使用防止了执行器在操作过程中卡住。还进行了交流驱动器的详细调查。
A new MEMS conical spring actuator array is proposed. Previously, we have developed conical spring microactuators having a long stroke (180 /spl mu/m) in the out-of-plane direction. However, the maximum output force and the packing density were not satisfactory. In the present paper, mechanical and electrical models of a conical spring are described for the calculation of the maximum output force and the driving voltage. Geometrical parameters were optimized using these models and a new geometry for the actuator was derived. The new geometry incorporates a wider and thicker spring that increased the maximum output force from 0.087 mN up to 0.83 mN. The packing density was increased up to 1 actuator/mm/sup 2/ using an additional interconnect layer. In addition, the driving voltage was decreased using a thinner insulating layer. The use of an ac drive prevented the sticking of the actuator during operation. A detailed investigation of the ac drive was also performed.