Light-Boosting Highly Sensitive Pressure Sensors Based on Bioinspired Multiscale Surface Structures
Light-Boosting Highly Sensitive Pressure Sensors Based on Bioinspired Multiscale Surface Structures
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基于仿生多尺度表面结构的光增强高灵敏压力传感器
DOI：
10.1002/adfm.201907091
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发表时间：
2020
影响因子：
19
通讯作者：
Conghua Lu
中科院分区：
文献类型：
--
作者：
Shixiong Yu;Lele Li;Juanjuan Wang;Enping Liu;Jingxin Zhao;Fan Xu;Yanping Cao;Conghua Lu
压力传感器因其在健康监测、人机界面、人工智能等领域的潜在应用而备受关注。提高压力传感的性能，特别是灵敏度和检测极限，对扩展相关应用具有重要意义，但迄今为止仍然是一个巨大的挑战。本文报道了具有新型光增强传感性能的高灵敏度压阻式压力传感器。玫瑰花瓣模板的正多尺度毫米/微/纳米结构与表面起皱纳米图案相结合，使组装的压力传感器具有超高灵敏度（70 KPa−1,<0.5 KPa）、超低检测限（0.88 Pa）、宽压力检测离子范围（0.88 Pa至32 KPa）和快速响应时间（30 ms）等优异的压力传感性能。值得注意的是，简单光照进一步将灵敏度提高到120 KPa−1(<0.5 KPa)，并将检测限降低到0.41 Pa。此外，灵活的光照明提供了前所未有的能力，可以在时空上控制多路压力传感器中的任何目标，从而实现光学增强/可定制的传感性能。这种光控策略加上生物启发的多尺度结构的引入，有望帮助设计下一代先进的可穿戴电子设备，实现前所未有的智能应用。
Pressure sensors have attracted tremendous attention because of their potential applications in the fields of health monitoring, human–machine interfaces, artificial intelligence, and so on. Improving pressure‐sensing performances, especially the sensitivity and the detection limit, is of great importance to expand the related applications, however it is still an enormous challenge so far. Herein, highly sensitive piezoresistive pressure sensors are reported with novel light‐boosting sensing performances. Rose petal–templated positive multiscale millimeter/micro/nanostructures combined with surface wrinkling nanopatterns endow the assembled pressure sensors with outstanding pressure sensing performance, e.g. an ultrahigh sensitivity (70 KPa−1, <0.5 KPa), an ultralow detection limit (0.88 Pa), a wide pressure detect ion range (from 0.88 Pa to 32 KPa), and a fast response time (30 ms). Remarkably, simple light illumination further enhances the sensitivity to 120 KPa−1(<0.5 KPa) and lowers the detection limit to 0.41 Pa. Furthermore, the flexible light illumination offers unprecedented capabilities to spatiotemporally control any target in multiplexed pressure sensors for optically enhanced/tailorable sensing performances. This light‐control strategy coupled with the introduction of bioinspired multiscale structures is expected to help design next generation advanced wearable electronic devices for unprecedented smart applications.