Lateral metallic devices made by a multiangle shadow evaporation technique
Lateral metallic devices made by a multiangle shadow evaporation technique
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DOI：
10.1116/1.4722982
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发表时间：
2012-07-01
影响因子：
1.4
通讯作者：
Valenzuela, Sergio O.
中科院分区：
文献类型：
--
作者：
Costache, Marius V.;Bridoux, German;Valenzuela, Sergio O.
作者报道了使用专门设计的抗蚀剂掩模和多角度阴影蒸发制造具有多种材料的横向金属结构。整个制造过程在不破坏真空的情况下进行，这避免了污染，并允许顺序沉积的金属之间的界面特性得到高度控制。作者将掩模的厚度作为设计参数，这允许在同一器件中的多个触点之间引入受控的变化。利用悬浮掩模制作了具有不同电阻的隧道结的非对称单电子晶体管。使用一个nonsuspended的掩模，它说明了制造的扩展结构（热电堆），它由十分之一的铁磁线与30 nm的标称宽度串联电连接，使用一个金属氧化物。(C)2012年美国真空学会。[http：//dx.doi.org/10.1116/1.4722982]
The authors report the fabrication of lateral metallic structures with multiple materials using specifically designed resist masks and multiangle shadow evaporation. The whole fabrication process is carried out without breaking vacuum, which avoids contamination and allows for highly controlled interface properties between metals deposited sequentially. The authors incorporate the thickness of the mask as a design parameter, which allows one to introduce controlled variations between multiple contacts in the same device. Using a suspended mask, it is demonstrated the fabrication of asymmetric single electron transistors with tunnel junctions with different resistances. Using a nonsuspended mask, it is illustrated the fabrication of an extended structure (a thermopile), which consists of tenths of ferromagnetic wires with a nominal width of 30 nm connected electrically in series using a nonmagnetic metal. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.4722982]