Study of scratch drive actuator force characteristics
Study of scratch drive actuator force characteristics
复制标题
划痕驱动作动器力特性研究
DOI：
10.1088/0960-1317/12/6/303
复制
发表时间：
2002
影响因子：
2.3
通讯作者：
D. Uttamchandani
中科院分区：
文献类型：
--
作者：
Lijie Li;J. G. Brown;D. Uttamchandani
微致动器是MEMS技术中的关键部件之一，通过不同的制造工艺实现了各种设计。通常使用的一种类型的微致动器是划痕驱动致动器（SDA），其通常通过表面微机械加工工艺制造。已进行了实验研究的力特性的SDA使用JDSU微系统MUMPs过程中制造。一个，两个，三个和四个板SDA连接到盒弹簧已被设计和制造这些实验使用MUMPs运行44。利用ANSYS有限元分析软件计算了箱形弹簧的弹簧常数。弹簧常数和弹簧伸长的乘积用于测量这些SDA产生的力。据估计，单板SDA产生的力超过250 μN，四板SDA产生的力超过850 μN。
Microactuators are one of the key components in MEMS technology, and various designs have been realized through different fabrication processes. One type of microactuator commonly used is the scratch drive actuator (SDA) that is frequently fabricated by surface micromachining processes. An experimental investigation has been conducted on the force characteristics of SDAs fabricated using the JDSU Microsystems MUMPs process. One-, two-, three- and four-plate SDAs connected to box-springs have been designed and fabricated for these experiments using MUMPs run 44. The spring constant for the box-springs has been calculated by FEM using ANSYS software. The product of the spring constant and spring extension is used to measure the forces produced by these SDAs. It is estimated that the forces produced exceed 250 μN from a one-plate SDA and 850 μN from a four-plate SDA.