Fabrication and Characterization of Microstacked PZT Actuator for MEMS Applications
Fabrication and Characterization of Microstacked PZT Actuator for MEMS Applications
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DOI：
10.1109/jmems.2014.2317495
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发表时间：
2015-02-01
影响因子：
2.7
通讯作者：
Esashi, Masayoshi
中科院分区：
文献类型：
--
作者：
Sabri, Mohd Faizul Mohd;Ono, Takahito;Esashi, Masayoshi
一个微叠层PZT致动器的尺寸为8毫米× 0.8毫米× 0.4毫米，并能够在100 V的电压下的2.3 μ m的致动，制造和表征。然后将该致动器集成到尺寸为20 mm x 20 mm x 0.4 mm的硅微载物台中，该硅微载物台需要由小型化致动器致动。微平台被设计成包含Moonie放大机构，以进一步放大堆叠的PZT致动器的致动。的微型台性能的实验表征表明，一个堆叠的PZT致动器与门尼放大机构的组合是成功的，使高放大的微型台类似于15倍的PZT致动器的原始位移。在横向振动模式中，在60 V的外加电压和456 Hz的谐振频率下观察到16.5 μ m的位移。为了说明微型驱动器的定制化制造对于成功设计高面积效率的微工作台是必不可少的，还讨论了驱动器参数与微工作台设计和性能之间的关系。的叠层PZT致动器的位移的解析推导也进行了，以评估制造的致动器的有效性相比，理想的叠层PZT结构。[2013-0231] 2013 -0231 [2013-0231][2013-0231]
A microstacked PZT actuator of dimensions 8 mmx 0.8 mm x 0.4 mm and capable of 2.3-mu m actuation under a voltage of 100 V was fabricated and characterized. This actuator was then integrated into a silicon microstage with dimensions of 20 mm x 20 mm x 0.4 mm requiring actuation by a miniaturized actuator. The microstage was designed containing a Moonie amplification mechanism in order to further amplify the actuation of the stacked PZT actuator. Experimental characterization of the microstage performance indicated that the combination of a stacked PZT actuator with the Moonie amplification mechanism was successful in enabling high amplification of the microstage to similar to 15 times the original displacement of the PZT actuator. A displacement of 16.5 mu m at an applied voltage of 60 V and a resonant frequency of 456 Hz in the lateral vibration mode was observed. The relationship between the actuator parameters and the microstage design and performance was also discussed in order to show that the customized fabrication of a miniature actuator was imperative for the successful design of a high area-efficiency microstage. Analytical derivation of the displacement of the stacked PZT actuator was also carried out in order to evaluate the effectiveness of the fabricated actuator compared with the ideal stacked PZT structure. [2013-0231]