A COMPARISON OF SCANNING METHODS AND THE VERTICAL CONTROL IMPLICATIONS FOR SCANNING PROBE MICROSCOPY
A COMPARISON OF SCANNING METHODS AND THE VERTICAL CONTROL IMPLICATIONS FOR SCANNING PROBE MICROSCOPY
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DOI：
10.1002/asjc.1422
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发表时间：
2018-07-01
影响因子：
2.4
通讯作者：
Fleming, Andrew J.
中科院分区：
文献类型：
--
作者：
Teo, Yik R.;Yong, Yuen;Fleming, Andrew J.
本文比较了扫描探针显微镜的非传统扫描模式的成像性能，包括正弦光栅、螺旋和利萨如模式。考虑的指标包括探头速度、扫描频率和所需的采样率。详细研究了探头速度，因为该量与垂直反馈环路所需的带宽成正比，并且对图像质量有重大影响。通过考虑具有脉冲傅立叶变换的样本，可以观察和量化扫描轨迹对成像质量的影响。研究发现非线性轨迹可以扩展地形信号带宽，这对低速和高速成像都有重要影响。这些效应通过周期性校准光栅进行分析研究和实验证明。
This article compares the imaging performance of non-traditional scanning patterns for scanning probe microscopy including sinusoidal raster, spiral, and Lissajous patterns. The metrics under consideration include the probe velocity, scanning frequency, and required sampling rate. The probe velocity is investigated in detail as this quantity is proportional to the required bandwidth of the vertical feedback loop and has a major impact on image quality. By considering a sample with an impulsive Fourier transform, the effect of scanning trajectories on imaging quality can be observed and quantified. The non-linear trajectories are found to spread the topography signal bandwidth which has important implications for both low and high-speed imaging. These effects are studied analytically and demonstrated experimentally with a periodic calibration grating.