Fabrication of Superconducting Mid-infrared Photo-detectors with Dipole Nano-antennas
Fabrication of Superconducting Mid-infrared Photo-detectors with Dipole Nano-antennas
复制标题
偶极子纳米天线超导中红外光电探测器的制作
DOI：
10.1109/tasc.2014.2381514
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发表时间：
2015
影响因子：
1.8
通讯作者：
and H. Shimakage
中科院分区：
文献类型：
--
作者：
A. Kawakami;J. Horikawa;M. Hyodo;S. Tanaka;M. Takeda;and H. Shimakage
我们提出了使用纳米天线与超导探测器，以提高红外探测器的响应性能。制作具有NbN负载电阻的偶极纳米天线以评估天线特性。通过电磁场仿真，确定天线长度为2400 nm，工作波长为7 μm。天线进行了评估，通过使用傅里叶变换红外光谱。在光谱传输特性的评估中，在1400 cm-1附近观察到由天线效应引起的明显吸收。模拟结果与实验结果定性一致。还评价了水循环微波消融针的有效面积，在1420 cm-1处，面积估计约为5.4 μ m2。我们已经制作了一个原型的中红外（MIR）的光电探测器，形成了45个偶极天线与NbN带。天线放置在20 × 20 μm2的面积内，通过偏置线串联。在MIR（λ = 4.9 μm）光照射下，观察到天线效应引起的高偏振相关值的响应。
We have proposed using nanoantennas with superconducting detector to improve the response performance of infrared detectors. Dipole nanoantennas that have an NbN load resistance were fabricated to evaluate the antenna properties. By using electromagnetic simulation, the antenna length was set at 2400 nm for the operation around 7-μm wavelength. The antennas were evaluated by using Fourier transform infrared spectroscopy. In an evaluation of spectral transmission characteristics, clear absorption caused by antenna effects was observed at around 1400 cm-1. The results of the simulation qualitatively agreed with the results of the experiment. The antenna effective area was also evaluated, and the area was estimated to be approximately 5.4 μm2at 1420 cm-1. We have fabricated a prototype of midinfrared (MIR) photodetectors that were formed with 45 dipole antennas with an NbN strip. The antennas were placed within an area of 20 × 20 μm2, and they were connected by bias line in series. By the irradiation of MIR (λ = 4.9 μm) light, the responses with high polarization dependence values caused by antenna effect were observed.