Micro-hole drilling on glass plates by femtosecond laser pulses
Micro-hole drilling on glass plates by femtosecond laser pulses
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利用飞秒激光脉冲在玻璃板上钻孔微孔
DOI：
10.1117/12.486534
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
Yoshiro Ito
中科院分区：
文献类型：
--
作者：
Noriyuki Kuriyama;Yoshiro Ito
飞秒激光脉冲在玻璃板上钻出了几十微米的孔。飞秒激光(Clark-MXR，CPA 2001)以1 kHz的频率发射775 nm、150 ps的脉冲，用于在约150微米厚的玻璃板上加工孔。激光脉冲通过平凸透镜聚焦到玻璃板上。电子快门控制照射激光脉冲的数量。钻孔入口处无裂纹，但出口处出现壳状裂纹。通过使用硅橡胶材料制作复制品，对钻孔的形状进行了详细检查。细小碎屑散落在钻孔周围，其沉积范围取决于激光峰值功率。随着脉冲次数的增加，孔洞的发展呈现出几个不同的阶段。最初的几十个脉冲钻进了一个浅而平的底孔，在平底的中心有一个更深的通道。然后，平底和沟槽出现在一个深的漏斗形洞中，洞的壁呈锥形。根据脉冲能量和聚焦条件的不同，在一定的脉冲数下，小孔会变得更深，并最终到达背面。焦点相对于玻璃表面的位置影响钻孔的形状。这意味着钻孔的形状对激光强度分布非常敏感，具有明确的阈值，这意味着有可能通过适当的衍射光学来钻孔设计的形状的孔，以改变激光的强度分布。
Holes of few tens of micrometers have been drilled through a glass plate by femtosecond laser pulses. A femtosecond laser (Clark-MXR, CPA 2001) which delivered 775 nm, 150 fs pulses at 1 kHz was used to machine holes through glass plates of about 150 micrometer thick. Laser pulses were focused by a plano-convex lens on to the glass plate. An electric shutter controlled number of irradiating laser pulse. Entrances of the drilled hole were crack-free but shell-like cracks appeared at exit end of them. Shapes of the drilled holes were examined in detail by taking replicas of them using silicon-rubber based material. Small debris scattered around the drilled hole and its deposition range depended on the laser peak power. Development of the hole with increasing pulse numbers showed several distinct stages. The first few tens of pulses drilled a shallow, flat bottom hole with a deeper channel at the center of a flat bottom. Then, the flat bottom and the channel emerged into a deep, funnel shaped hole with tapered wall. The hole became deeper and finally went through to the rear side at certain pulse numbers, which depended on pulse energy and focusing conditions. Position of the focus relative to the glass surface affected the shape of drilled holes. This means that the shape of the drilled hole is very sensitive to laser intensity distribution with a well defined threshold and would suggests the possibility of drilling designed-shape holes with proper diffractive optics for modifying the intensity distribution of the laser light.