Effect of air humidity on gas response of SnO2 thin film ozone sensors
Effect of air humidity on gas response of SnO2 thin film ozone sensors
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DOI：
10.1016/j.snb.2006.06.025
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发表时间：
2007-03-26
影响因子：
8.4
通讯作者：
Stetter, J. R.
中科院分区：
文献类型：
--
作者：
Korotcenkov, G.;Blinov, I.;Stetter, J. R.
讨论了SnO2薄膜传感器对臭氧响应的特性。采用喷雾热解法制备了厚度为30~200 nm的薄膜。通过研究传感器响应动力学和湿度对气敏特性的影响来理解这些独特的响应。薄膜对干燥(臭氧+空气)气体的响应是一个多步骤的过程，反映了一个复杂的反应机理。周围大气中的湿度使这一过程变得更加复杂。研究发现，水和氧的吸附/脱附共同控制了SnO2传感器的气体响应动力学。有趣的是，更高的热解温度和操作温度都促进了湿度对气敏元件响应的影响的降低。这项工作表明，在更高的温度下，传感器响应中出现较慢的成分T-op>；400℃，这与SnO2颗粒中大部分扩散过程的影响增加有关，这与还原/再氧化过程是一致的。(C)2006爱思唯尔B.V.保留所有权利。
The peculiarities in the sensor response to ozone are discussed for SnO2 thin films. Films with thickness from 30 to 200 nm were deposited by spray pyrolysis. The study of sensor response kinetics and humidity influence on the gas sensing characteristics was used to understand these unique responses. The response to dry (ozone + air) gas of the films was a multiple-step process, reflecting a complex reaction mechanism. The presence of humidity in the surrounding atmosphere made this process still more complicated. It was found that adsorption/desorption of both water and oxygen controlled the kinetics of gas response of the SnO2-based sensors. Interestingly, higher pyrolysis and operation temperatures both promoted a lowering of the humidity influence on the gas sensor response.This work suggests that the appearance of a slower component in sensor response at higher temperatures, T-oper > 400 degrees C, is connected with the increased influence by diffusion processes in the bulk of the SnO2 grains, which is consistent with reduction/reoxidation processes. (c) 2006 Elsevier B.V. All rights reserved.