Surface structures on crystalline silicon irradiated by 10 ps laser pulses at 694.3 nm
Surface structures on crystalline silicon irradiated by 10 ps laser pulses at 694.3 nm
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694.3 nm 10 ps 激光脉冲照射晶体硅的表面结构
DOI：
10.1007/bf00619721
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发表时间：
1989
期刊：
影响因子：
--
通讯作者：
C. O. Park
中科院分区：
文献类型：
--
作者：
T. ;H. Lee;J. Kim;C. O. Park
通过波长为 694.3 nm 的 10 ps 锁模红宝石激光脉冲串在单晶硅的 (100) 表面上产生类似光栅的空间周期结构。结构的周期和方向与入射光与表面粗糙度耦合激发的表面电磁波的干涉模型一致。以前未被重视的椭圆波纹图案被发现并被解释为由于能量的径向不均匀沉积而在熔融硅表面上激发的毛细波的轨迹。
The grating-like spatially periodic structures are produced on the (100) surfaces of the single crystal silicon by the trains of 10 ps mode-locked ruby laser pulses at the wavelength of 694.3 nm. The periods and orientations of the structures are consistent with the model which involves the interference of the incident light with the surface electromagnetic wave excited through the coupling by surface roughness. Previously unappreciated elliptic ripple patterns are found and explained as the trails of the capillary wave excited on the molten Si surface due to the radially non-uniform deposition of energy.